Fabrication de micro bolomètre par laser

This paper presents the laser trimming process developed at INO to pattern gold black films deposited on bolometric detector pixels used for short and long wave infrared measurements within the Broadband Radiometer (BBR) system.

This instrument is being developed for the ESA (European Space Agency) EarthCARE satellite. The BBR instrument objective is to provide top-of-atmosphere (TOA) radiance measurements. Each detector consists of an uncooled 30-pixel linear focal plane array (FPA) coated with gold black giving a uniform spectral responsivity from 0.2 µm to 50 µm.

To meet the specific needs of the BBR instrument, INO designed and fabricated custom linear FPAs. These are VOx-based, double-level platform, uncooled microbolometer detectors. Co-funded by the Canadian Space Agency (CSA), INO has developed its own gold-black deposition and laser machining facilities that ensure uniform spectral responsivity and thermal isolation between pixels. The use of a femtosecond laser coupled with a 1 µm accuracy positioning system allows trimming the gold-black film without degrading performance.

D. Gay

Institut National d’Optique (INO)

2740 Einstein Street, Quebec, QC, G1P 4S4, Canada

david.gay@alphanov.com