Procédés de micro-usinage 2D et 3D par lasers UV à impulsions courtes pour la fabrication industrielle.

The current availability of different short and ultra-short laser sources are extending the applications fields of laser microprocessing. Nowadays MEMSs, fluidic devices, advanced sensors and biomedical devices and instruments are among the most significant developments of this technology. The fast development in the understanding and implementation of micromachining process has easily led to the expectation of industrial scale production of different relevant components and to the consequent attempt for the building up of specific laser based machines for each process of interest.

However most of these new facilities easily work strictly in the 2D frame, while a much more difficult task is to setup experimental equipments for filling the gap existing from the fabrication point of view for fully 3D micromachining applications. Even more for the development of micromanufacturing systems exportable to industry.

At the UPM Laser Centre, the task of micromachining processes design and implementation from an industrially exportable point of view has been undertaken in view of the needs expressed by different application actors and the corresponding manufacturing aids and quality control procedures have been setup as required by industrial practice.
   
In this paper, the conception, design and first results of a fully automatized 2D/3D laser micromachining workstation based on the main concepts of accuracy, flexibility and process quality control is presented. Additionally, the appropriate (dimensional) quality control procedures have been implemented. Several examples of first results obtained with this system are presented. In figure 1, two sample components showing the possibilities of the developed system are displayed.

J.L. Ocaña, C. Molpeceres, M. Morales, M. Holgado, J.J García-Ballesteros, F.J. Sanza

Centro Láser UPM. Universidad Politécnica de Madrid. Campus Sur UPM. Ctra. de Valencia, km. 7,300. 28031 Madrid. SPAIN.

E-mail: jlocana@etsii.upm.es